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  3. Number 828, 2015
  4. Mathematical modelling and simulation of the mechanical component of the fully differential capacitive MEMS accelerometer using MATLAB/Simulink environment

Mathematical modelling and simulation of the mechanical component of the fully differential capacitive MEMS accelerometer using MATLAB/Simulink environment

CDS-archive.
2015;
, Number 828
: pp. 20 – 26
Authors: 

Holovatyy А., Teslyuk V., Panchak R., Koshyrets S.

Holovatyy A.1, Teslyuk V.2, Panchak R.2, Koshyrets S.1

  1. The National Forestry and Wood-Technology University of Ukraine, Department of information technologies.
  2. Lviv Polytechnic National University, Department of computer-aided design systems.

Simulation model of the mechanical component of the fully differential capacitive MEMS accelerometer has been developed using MATLAB/Simulink environment. The model allows to simulate movement of the proof mass, capacitance changes of the sense capacitors of the sensitive element, sensitivity of the sensor depending on the applied force of acceleration, and to perform the transient analysis of the integrated device at the system level of computeraided design.

Microelectromechanical systems (MEMS)
fully differential capacitive MEMS accelerometer
acceleration
mathematical modeling
simulation model
transient analysis
CAD system
MATLAB/Simulink
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