Research of accuracy of the actual value of magnification (scale) of digital SEM images generated by SEMJCM-5000 (NeoScope) of firm JEOL

: pp. 80 - 84
Lviv polytechnic National University

Using measurements of digital SEM image of a special test object with a resolution of r = 1425 lin/mm, obtained by SEM JCM-5000 (NeoScope), determined their actual magnification (scale) along the axes x and y-SEM images in the range SEM increases from 1000x to 40000x. Found that large-scale distortion of digital SEM images obtained on this type of SEM does not exceed ± 1 %, regardless of size increase and make the picture.


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