Research of accuracy of the actual value of magnification (scale) of digital SEM images generated by SEMJCM-5000 (NeoScope) of firm JEOL

2012;
: pp. 80 - 84
Authors:
1
Lviv polytechnic National University

Using measurements of digital SEM image of a special test object with a resolution of r = 1425 lin/mm, obtained by SEM JCM-5000 (NeoScope), determined their actual magnification (scale) along the axes x and y-SEM images in the range SEM increases from 1000x to 40000x. Found that large-scale distortion of digital SEM images obtained on this type of SEM does not exceed ± 1 %, regardless of size increase and make the picture.

 

  1. Boyde A., Ross H.F. Photogrammetry and Scanning electron microscopy. Photogrammetric Record. 1975, Vol.8, no.46, P.408-457.
  2. Burkhardt R. Untersuchungen zur kalibrirung eines Elektronen mikroskopes. Mitt. geod. Inst. Techn. Univ. Graz. 1980, no.35.
  3. Ghosh S. K. Photogrammetric calibration of a scanning electron microscope. Photogrammetria. 1975, V.31, no.31, P.91-114.
  4. Ghosh S. K., Nagaraja H. Scanning Electron Micrography and Phtogrammetry. Photogrammetric Engineering and Remote Sensing. 1976, Vol.42, no.5, P.649-657.
  5. Howell P. A practical method for the correction of distortions in SEM photogrammetry. Proc. Of the Annual Scanning Electron Microscope Symposium. Chicago, Illinois. 1975, P.199-206.
  6. Ivanchuk O.M., Hrupin I.V. Struktura ta funkcii prohramnoho kompleksu “Dimicros” dlja opracjuvannja REM-zobrazhen na cufrovij fotohrammetrychnij stanciji [Structure and function of the program complex «Dimicros» processing of SEM images on a digital photogrammetric station], Recent advances in geodetic science and industry, Lviv, 2012, issue 1(23), pp.193-197.
  7. Kostyshyn M.T., Mustafin K.S. Kvantovaja elektronika [Quantum Electronics], Kyiv, 1982, issue 23, pp.29-33.
  8. Kalantarov E.I., Sagyndykova M.Zh. Photogrammetricheskaja kalibrovka electronnych microskopov [Photogrammetric calibration of electron microscopes]. Proceedings of the universities. Surveying and aerial photography, Moskow, 1983, issue4, pp.76-80.
  9. Melnik V.N., Sokolov V.N., Ivanchuk O.M., Tumskaja O.V., Shebatinov M.P. Kalibrovka geometricheskich iskazhenij REM-snimkov [Calibration of geometric distortion SEM images], Manuscript deposited at VINITI, Moskow, 1984, issue 528, 18 p.
  10. Melnik V.M., Shostak A.M. Rastrovo-elektronna stereomikrofraktohrafija [Raster electron stereomikrofraktografition], Luck, Vezha, 2009. 469 p.
  11. Finkovsky V.J., Melnik V.N., Ivanchuk O.M. K teorii photogrammetricheskoj obrabotki REM-snimkov [Theory of photogrammetric processing of SEM images], Geodesy and Cartography, Moskow, 1984, issue 2, pp.29-33.
  12. Shostak A.V. Metody i modeli mikrophotogrammetrii u prukladnych naukovych doslidzhennjach. Dokt. Diss. [Methods and models mikrophotogrammetry in applied research. Doct. Diss.]. Kyiv, 2012. 28 p.