geometric distortion of digital SEM images

A study of fractal and metric properties of images based on measurements data of multiscale digital sem images of a test object obtained

Purpose. The goal of this work is to establish and study the fractal and metric characteristics of images obtained with scanning electron microscopes (SEM). Methods. This approach is based on the processing of measurements data of digital SEM images of a test object obtained on four types of modern SEM in the magnification range from 1000x to 30000x. Results. The analytical relationship between the increase that was set on the device scale and the “fractal” increase (scale) is established.