Method of surface reconstruction from white light interferogram based on hilbert transrorm

Authors: 

A. Khoma

In this paper theoretical fundamentals of white light interferometry and mathematical model of interferogramm were analyzed. The method of topography reconstruction from phase of white-light interferogramm based on amplitude demodulation using Hilbert transform was developed. The verification of introduced algorithm on tilted and sphere surface is presented and the main sources of reconstruction errors were analyzed.

1. Ajay Kumar etc. Formation of nanodiamonds at near-ambient conditions via microplasma dissociation of ethanolvapour // Nature Communications, 4, 2013. 2. Jirí Novák. Computer analysis of interference fields using MATLAB // In: MATLAB 2002. Prague : HUMUSOFT, 2002, p. 406-410. 3. Kieran G. Larkin. Efficient nonlinear algorithm for envelope detection in white light interferometry // J. Opt. Soc. Am. A/ Vol. 13, No. 4/ April 1996, 832-843. 4. Masaaki Adachi. Phase-Shift Algorithm for White-Light Interferometry. Insensitive to Linear Errors in Phase Shift // Kakuma-machi, Kanazawa, 920-1192, Japan. 5.  Кальянов А.Л. и др. Отическая низкокогерентная интерферометрия и томография. Саратов, 2009, 86 с.. 6. Thomas Seiffert: Schnelle Signalvorverarbeitung in der Weißlichtinterferometrie durch nichtlineare Signalaufnahme – Stuttgart 2004. 7. А.Б.Сергиенко "Цифровая обработка сигналов" 2-е изд.: Питер,2006.-751с. 8. Sang, Wolfram: Entwicklung und Implementierung eines Verfahrens zur Auswertung von Weißlichtinterferogrammen zur Bestimmung der dreidimensionalen Oberflächentopographie von Mikro- und Nanostrukturen als Anwendung für eine Nanopositionier- und –messmaschine. Diplomarbeit –Technische Universität Ilmenau,2006. 9. http://www.mathworks.de/products/matlab/.