State and prospects of computerized systems monitoring the topology of surfaces, based on white light interferomertry
This paper describes a computerized system for object topology control based on a white light interferometer. The theoretical fundamentals of white light interferometry and mathematical model of an interferogram are presented. An overview and comparative analysis of methods for the reconstruction of the topology of surfaces based on a white light interferogram are performed, their main advantages and disadvantages are defined, and the objectives for the development of computerized systems are formulated.