FREQUENCY COMB-COUPLED METROLOGY LASERS FOR NANOPOSITIONING AND NANO MEASURING MACHINES
This article shows how a direct readout of the interferometric length measurement in nanopositioning machines can be transferred by connecting the metrology laser to a frequency comb line. The approach is based on a GPS-referenced frequency comb with which the stability of the timer (atomic clock via GPS) is transferred to the metrology laser of the nanopositioning and nanomeasuring machine NPMM-200. The necessary prerequisites for ensuring traceability are discussed.