sigma-delta force feedback control

Development of vhdl-ams model of integrated microaccelerometer with sigma-delta control

In the paper, VHDL-AMS model of microaccelerometer with sigma-delta control for computer-aided design has been developed. The created model has made possible the simulation of dynamic characteristics of the integrated capacitive microaccelerometer, signal processing and digitizing, simulation of force feedback control using sigma-delta technique on the applied force of acceleration and also to perform the analysis of the device at the behavioral level of computer-aided design.