STATUS AND PROSPECTS OF IMPROVING ENERGY EFFICIENCY CLEAN ROOMS AIR CONDITIONING SYSTEMS
The article is devoted to increasing the efficiency of the air conditioning systems of clean rooms, which maintain the microclimate parameters in a given range according to several indicators - the number and size per 1 m³ of dust particles, aerosols, microorganisms and pressure, humidity, and temperature.
Clean rooms are used in microelectronics, instrumentation, medicine and medical industry, pharmacology, laboratories, optics production, food industry, biotechnology, aviation, and space industry.