The article analyzes anchors influence of structural features on capacitive accelerometers integral structures output parameters.
1. Волович А., Волович Г. Интегральные акселерометры // Компоненты и технологии. – 2000. 2. Amarasinghe R. et al Design and fabrication of miniaturized six-degree of freedom piezoresistive acceleromete MEMS 2005: 18th IEEE International Conference on microelectromechanical systems. – Р. 351–354. 3. A capacitive humidity sensor integrated with micro heater and ring oscillator circuit fabricated by CMOS–MEMS technique Sensors and Actuators B: Chemical. – 2006. – 116, Issue 1. 4. Muller R.S. and K.Y. Lau, “Surface-Micromachined Microoptical Elements and Systems,” in Integrated Sensors, Microactuators, Microsystems (MEMS), Vol.86, No. 8, Aug.1998.