1. ISTCGCAP
  2. All Volumes and Issues
  3. Volume 63, 2003
  4. Investigation of the influence of changes in REM parameters on the magnitude and nature of geometric distortions of REM images obtained with the HITACHI S-800 REM

Investigation of the influence of changes in REM parameters on the magnitude and nature of geometric distortions of REM images obtained with the HITACHI S-800 REM

ISTCGCAP.
2003;
Volume 63, Number 63
: 145-152
Authors:
  1. О. М. Ivanchuk
1
Lviv Polytechnic National University

In the article the results of numerous researches of values and nature of geometrical distortions of the SEM­images obtained on SEM "Hitachi" S-800 when changes of parameters of SEM-surveying are presented: increases (scale) from 500x up to 50000х, angles of tilt of the goniometric table from 0° up to 10 and changes of its positioning lengthwise axis Z from Z - 14.0 mm up to Z = 16.0 mm with an interval of 0.5 mm. И is established, that on edges of SEM-images they can reach 1.5-2.0 mm, and on its central part in radius of 10 mm - 0.1-0.2 mm that are rather minute. The distortions have systematic character (approximately 90 % of its component), they are symmetric concerning image axes and remain practically invariable when considerable changes of parameters of SEM-surveying that allows to approximate them easily by a polynomial of a general view of the 3-rd degree.

1.Ivanchuk O.M. Metody operatyvnoho fotohrammetrychnoho opratsiuvannia znimkiv, otrymanykh na rastrovykh elektronnykh mikroskopakh: Avtoref. dys...kand. tekhn. nauk.-Lviv.-2000.- 18 s.

2. Mel'nik V.N., Ljubimov I.N. Metricheskie svojstva rastrovyh jelektronnomikroskopicheskih snimkov // Zavodskaja laboratorija.-1977.-№3.-S.288-291.

3. Mel'nik V.N., Sokolov V.N., Ivanchuk O.M., Tumskaja O.V., Shebatinov M.P. Kalibrovka geometricheskih iskazhenij RJeM-snimkov // Ruk. dep. v VINITI.-1984.-№528.-S.18.

4. Mel'nik V.I., Sokolov V.N., Shebatinov M.P., Ivanchuk O.M. Analiz pogreshnostej stereoizmerenii v rastrovoj jelektronnoj mikroskopii // Izv. AN SSSR. Ser. fizicheskaja.-1987.-№3.-S.468-474.

5. Mel'nik V.N., Ivanchuk O.M., Maksimjuk Ju.J. Kalibrovka geometricheskih iskazhenij RJeM-snimkov // Geodezija i fotogrammetrija.-Rostov n/D : Rost.inzh.-stroit.in-t.-1990.-S.37-44.              ^

6. Mel'nik V.N., Sokolov V.N. Fraktal'naja i stereometricheskaja ocenki RJeM-izobrazhenij // Izv. RAN.Ser. fizicheskaja. -  1993.-№8. - S.99 - 105.    

7. Melnyk V.M. Teoriia i praktyka fotohrammetrychnykh metodiv v elektronno-mikroskopichnykh doslidzhenniakh: Avtoref. dys.-.dokt, tekhn. nauk.-Lviv.-1995.- 51 s.

8. Finkovski V.J., Melnik V.N. Investigation of the raster electronic microstereophotogrammetric survey accuracy // Proc. Xlll the Congres of the Internat. Soc. Photogrammetry. Helsinki.-1976.-P.l-10.

9. Ghosh S. K., Nagaraja H. Scanning Electron Micrography and Programmetry // Photogrammetric Engineering and Remote Sensing.- l976.-Vol.42.-№5.-P.649-657.