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  4. To the theory of distortion distortions of REM-images

To the theory of distortion distortions of REM-images

ISTCGCAP.
2007;
Volume 68, Number 68
: 261-268
Authors:
  1. V. Melnyk
  2. A. V. Shostak
1
Lesya Ukrainka Eastern European National University
2
Lutsk National Technical University

In the article, a deformation of REM-image, determined by imperfect scanning process of microobjects surf ace by scanned probe are considered The theoretical bases if two methods regarding of similar deformation are proposed.

 

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