хвилі

RESEARCH OF VIBRATION OSCILLATIONS OF MEMS RESONATORS DURING THEIR OPERATION

 A mathematical model has been developed to study the amplitude-frequency characteristics of the resonator beam. Nonlinear mechanics methods were used in the modeling process. The model takes into account the influence of changes in the elastic properties of the beam material on its oscillation amplitude and frequency. To analyze the internal processes in the material, Voigt's and Bolotin's laws were applied.