SEM stereo pair

Automated generation of a digital model of an object's micro surface from a SEM-stereo pair by area-based image matching

Purpose. The goal of this work was the development and research of a method of automatically constructing a digital model of the micro surface of an object from SEM stereo pair of digital images taking into account the specifics of the survey SEM and evaluating the accuracy of digital modeling. Methods. The developed method consists, firstly, in generating a dense set of input points in the left SEM image of a stereo pair in regions with local features and using an iterative process in accordance with the levels of the image pyramid.