18 – 22 May 2022

XVIII International Conference Perspective technologies and methods in MEMS design


Polyana (Zakarpattya), Ukraine

Date: 7-11 September 2022
Venue: Polyana (Zakarpattya), Ukraine
Languages: English
Official Website: http://memstech.ieee.org.ua/


Topics include, but not limited to

  • Devices ranging in size from microns to millimeters.
  • Micro actuators.
  • Micro robots.
  • Micro batteries.
  • New materials and designs for MEMS.
  • IC-compatible fabrication techniques.
  • Other fabrication techniques.
  • Measurement of micro phenomena.
  • Theoretical results.
  • Electrical interconnections.
  • Micro telemanipulation, and standards appropriate to MEMS.
  • Application examples and application oriented devices in fluidics, optics and bio-medical engineering.

All accepted papers and oral (or poster) presenting at MEMSTECH-2022 will be submitted for revision to IEEE Xplore Digital Library.
“No-show” papers won’t be submitted for inclusion in IEEE Xplore Digital Library.