Microelectromechanical systems (MEMS)

In this paper the general process and the concurrent synthesis realization model of microelectromechanical systems, which is based on developed genetic algorithm, are described. As the synthesis task in the sphere of complex microsystems is very comprehensive and timeconsuming, the actuality of performance and speed issues to generate the novel system and its components constructions is still up-to-date unsolved item. The developed model facilitates and accelerates the synthesis of the new and unique microelectromechanical systems structures.

In the paper, VHDL-AMS model of microaccelerometer with sigma-delta control for computer-aided design has been developed. The created model has made possible the simulation of dynamic characteristics of the integrated capacitive microaccelerometer, signal processing and digitizing, simulation of force feedback control using sigma-delta technique on the applied force of acceleration and also to perform the analysis of the device at the behavioral level of computer-aided design.

Simulation model of the mechanical component of the fully differential capacitive MEMS accelerometer has been developed using MATLAB/Simulink environment. The model allows to simulate movement of the proof mass, capacitance changes of the sense capacitors of the sensitive element, sensitivity of the sensor depending on the applied force of acceleration, and to perform the transient analysis of the integrated device at the system level of computeraided design.