Simulation model of the mechanical component of the fully differential capacitive MEMS accelerometer has been developed using MATLAB/Simulink environment. The model allows to simulate movement of the proof mass, capacitance changes of the sense capacitors of the sensitive element, sensitivity of the sensor depending on the applied force of acceleration, and to perform the transient analysis of the integrated device at the system level of computeraided design.

- Yazdi N. Micromachined Inertial Sensors / Yazdi N., Ayazi F., Najafi K. // Proc IEEE, Aug. 1998, Vol. 86, № 8.
- Kanchan Sharma, Isaac G. Macwan, Linfeng Zhang, Lawrence Hmurcik, Xingguo Xiong. Design Optimization of MEMS Comb Accelerometer, Department of Electrical and Computer Engineering, pp. 10.
- Tolga Kaya, Behrouz Shiari, Kevin Petsch and David Yates. Design of a MEMS Capacitive Comb-drive Accelerometer. Central Michigan University, 2012, pp. 6.
- Akila Kannan. Design and Modeling of a MEMSBased Accelerometer with Pull In Analysis. Thesis, University of British Columbia, 149, pp. 149.
- Dr. Lynn Fuller, Motorola Professor. MEMS Capacitor Sensors and Actuators. / Dr. Fuller Lynn. – Rochester Institute of Technology, Microelectronic Eng. – May, 2007. – 34 p.
- Yun W. A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry : Doctoral Dissertation. – Univ. of California at Berkeley, 1992.
- Fedder G. K. Simulation of Microelectromechanical Systems : Doctoral Dissertation / G. K. Fedder. – Univ. of California at Berkeley, 1994.
- Pelesko John A. Modeling MEMS and NEMS / John A. Pelesko and David H. Bernstein. Chapman & Hall/CRC, 2002, 384 p.
- Frank W. Pietryga. Solving Differential Equations Using MATLAB/Simulink. University of Pittsburgh at Johnstown, 2005, 11 p.
- Houcque David. Introduction to Matlab for engineering students. Northwestern University. 2005, 74 p.
- Matlab Programming Fundamentals R2013b. The MathWorks, Inc. 2013, 985 p.
- Matlab – The Language of Technical Computing. The MathWorks, Inc. 2002, 602 p.