In this paper the general process and the concurrent synthesis realization model of microelectromechanical systems, which is based on developed genetic algorithm, are described. As the synthesis task in the sphere of complex microsystems is very comprehensive and timeconsuming, the actuality of performance and speed issues to generate the novel system and its components constructions is still up-to-date unsolved item. The developed model facilitates and accelerates the synthesis of the new and unique microelectromechanical systems structures.
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