test object

Research geometric distortion digital SEM-images obtained on SEM JSM-7100F (JEOL, Japan) and the accuracy of their approximation

Purpose. Digital-SEM image, due to various physical factors of scanning electron microscope inherent significant geometric distortion. The aim of this study is to establish and Effective consideration to improve the accuracy to obtain quantitative spatial parameters mikrosurface objects are investigated using SEM. This problem is extremely important, especially nowadays when needed control of technological processes for the production of micron and submicron levels, particularly in engineering, microelectronics and many others.

Research value errors increase (scale) digital SEM images obtained in the SEM-106 I (Sumy, Ukraine) using a special test object

Purpose. It is known that digital images microsurface solids obtained by scanning electron microscopy (SEM) of various types, as characterized by considerable scale and geometric distortion. Therefore, their establishment and accounting is an extremely important task, especially when creating a variety of microdevices with modern nanotechnology. This is a guarantee of reliability, accuracy and efficiency. Methodology.