digital SEM images

Using measurements of digital SEM image of a special test object with a resolution of r = 1425 lin/mm, obtained by SEM JCM-5000 (NeoScope), determined their actual magnification (scale) along the axes x and y-SEM images in the range SEM increases from 1000x to 40000x. Found that large-scale distortion of digital SEM images obtained on this type of SEM does not exceed ± 1 %, regardless of size increase and make the picture.

Purpose. Digital-SEM image, due to various physical factors of scanning electron microscope inherent significant geometric distortion. The aim of this study is to establish and Effective consideration to improve the accuracy to obtain quantitative spatial parameters mikrosurface objects are investigated using SEM. This problem is extremely important, especially nowadays when needed control of technological processes for the production of micron and submicron levels, particularly in engineering, microelectronics and many others.

For measurements of digital SEM images of test grid with a resolution 1425 lin/mm taken on a digital SEM DSM-960A (Carl Zeiss, Germany), are defined by their scale and geometric distortion of the SEM magnification range from 1000h to 20000h. Found that the large-scale distortions of digital SEM images obtained in this type of SEM is systematic, regardless of the increase and is approximately -2 % along the x-axis image and -4 % along the y-axis with a picture.

Purpose. It is known that digital images microsurface solids obtained by scanning electron microscopy (SEM) of various types, as characterized by considerable scale and geometric distortion. Therefore, their establishment and accounting is an extremely important task, especially when creating a variety of microdevices with modern nanotechnology. This is a guarantee of reliability, accuracy and efficiency. Methodology.