Research value errors increase (scale) digital SEM images obtained in the SEM-106 I (Sumy, Ukraine) using a special test object
Purpose. It is known that digital images microsurface solids obtained by scanning electron microscopy (SEM) of various types, as characterized by considerable scale and geometric distortion. Therefore, their establishment and accounting is an extremely important task, especially when creating a variety of microdevices with modern nanotechnology. This is a guarantee of reliability, accuracy and efficiency. Methodology.