the test object

A study of fractal and metric properties of images based on measurements data of multiscale digital sem images of a test object obtained

Purpose. The goal of this work is to establish and study the fractal and metric characteristics of images obtained with scanning electron microscopes (SEM). Methods. This approach is based on the processing of measurements data of digital SEM images of a test object obtained on four types of modern SEM in the magnification range from 1000x to 30000x. Results. The analytical relationship between the increase that was set on the device scale and the “fractal” increase (scale) is established.

Research of accuracy of the actual value of magnification (scale) of digital SEM images generated by SEMJCM-5000 (NeoScope) of firm JEOL

Using measurements of digital SEM image of a special test object with a resolution of r = 1425 lin/mm, obtained by SEM JCM-5000 (NeoScope), determined their actual magnification (scale) along the axes x and y-SEM images in the range SEM increases from 1000x to 40000x. Found that large-scale distortion of digital SEM images obtained on this type of SEM does not exceed ± 1 %, regardless of size increase and make the picture.


Development and research of technology for automation of the calibration and account of digital SEM images having geometric distortion obtained with JCM 5000 (Neoscope) (Jeol, Japan)

Purpose. Solids microsurface digital images obtained with scanning electron microscopes (SEM) are characterized by significant geometric distortions, which must be defined and taken into account when determining the quantitative parameters of microsurface solids with high accuracy. Therefore, this problem is so important and urgent, especially during the high-tech quality control of production processes using nanotechnology, particularly in mechanical engineering, aircraft construction, and for creating space and military equipment.