Development and research of technology for automation of the calibration and account of digital SEM images having geometric distortion obtained with JCM 5000 (Neoscope) (Jeol, Japan)
Purpose. Solids microsurface digital images obtained with scanning electron microscopes (SEM) are characterized by significant geometric distortions, which must be defined and taken into account when determining the quantitative parameters of microsurface solids with high accuracy. Therefore, this problem is so important and urgent, especially during the high-tech quality control of production processes using nanotechnology, particularly in mechanical engineering, aircraft construction, and for creating space and military equipment.