FREQUENCY COMB-COUPLED METROLOGY LASERS FOR NANOPOSITIONING AND NANO MEASURING MACHINES

2021;
: pp. 36-42
1
Institute of Process Measurement and Sensor Technology, Ilmenau
2
Institute of Process Measurement and Sensor Technology, Ilmenau
3
Інститут процесів вимірювання та сенсорних технологій, Технічний університет, м.Ільменау, Німеччина
4
Технічний університет Ільменау
5
Technical University, Ilmenau, Germany

This article shows how a direct readout of the interferometric length measurement in nanopositioning machines can be transferred by connecting the metrology laser to a frequency comb line. The approach is based on a GPS-referenced frequency comb with which the stability of the timer (atomic clock via GPS) is transferred to the metrology laser of the nanopositioning and nano measuring machine NPMM-200. The necessary prerequisites for ensuring traceability are discussed. It is demonstrated that with this approach an improvement in the long-term stability of the metrology laser by three orders of magnitude can be achieved.

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