Sensors with a frequency output signal are marked as particularly high accuracy, it is easy to switch, and signals may be transmitted over long distances. The main element of such sensors is an electromechanical oscillator connected to the feedback of the autogenerator. String metal oscillators do not provide the required measurement accuracy due to unsatisfactory elasticity, hysteresis, relaxation, and drift of characterisrics. The creation of oscillators made of quartz and silicon due to the perfection of these materials, is difficult. Tere exist the technological problems and problems of conjugation of temperature coefficients of materials expansion. It is proposed a quartz sensor without an oscillator, made from the quartz and equipped by optoelectronic means.
[1]. V. Rak, Acoustic gas analyzer, Measuring equipment and metrology, Vol.79, Issue 2, 2018, pp.13–19.
https://doi.org/10.23939/istcmtm2018.02.013
[2]. https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190074/#B132-micromachines-07-00160
[3]. V. Simonov, L. Simonova, Resonant pressure, force or displacement sensor and method of its manufacture, Pat. RU 2379638 C1, Publ. 20.01.2010, Bull. № 2.