тест-об’єкт

Purpose. The goal of this work is to establish and study the fractal and metric characteristics of images obtained with scanning electron microscopes (SEM). Methods. This approach is based on the processing of measurements data of digital SEM images of a test object obtained on four types of modern SEM in the magnification range from 1000x to 30000x. Results. The analytical relationship between the increase that was set on the device scale and the “fractal” increase (scale) is established.

Using measurements of digital SEM image of a special test object with a resolution of r = 1425 lin/mm, obtained by SEM JCM-5000 (NeoScope), determined their actual magnification (scale) along the axes x and y-SEM images in the range SEM increases from 1000x to 40000x. Found that large-scale distortion of digital SEM images obtained on this type of SEM does not exceed ± 1 %, regardless of size increase and make the picture.

Purpose. Digital-SEM image, due to various physical factors of scanning electron microscope inherent significant geometric distortion. The aim of this study is to establish and Effective consideration to improve the accuracy to obtain quantitative spatial parameters mikrosurface objects are investigated using SEM. This problem is extremely important, especially nowadays when needed control of technological processes for the production of micron and submicron levels, particularly in engineering, microelectronics and many others.

Purpose. Solids microsurface digital images obtained with scanning electron microscopes (SEM) are characterized by significant geometric distortions, which must be defined and taken into account when determining the quantitative parameters of microsurface solids with high accuracy. Therefore, this problem is so important and urgent, especially during the high-tech quality control of production processes using nanotechnology, particularly in mechanical engineering, aircraft construction, and for creating space and military equipment.

Purpose. It is known that digital images microsurface solids obtained by scanning electron microscopy (SEM) of various types, as characterized by considerable scale and geometric distortion. Therefore, their establishment and accounting is an extremely important task, especially when creating a variety of microdevices with modern nanotechnology. This is a guarantee of reliability, accuracy and efficiency. Methodology.