The article is devoted to increasing the efficiency of the air conditioning systems of clean rooms, which maintain the microclimate parameters in a given range according to several indicators - the number and size per 1 m³ of dust particles, aerosols, microorganisms and pressure, humidity, and temperature.

Clean rooms are used in microelectronics, instrumentation, medicine and medical industry, pharmacology, laboratories, optics production, food industry, biotechnology, aviation, and space industry.

Recently, abroad and in Ukraine, with the aim of saving energy resources, fundamental research is being conducted in a number of technologies from the perspective of exergetic methodology. This contributes to an objective assessment of the degree of energy perfection of devices and processes related to energy conversion in modern technologies.

For this purpose, the authors developed an exergetic method of analyzing the operation of the direct-flow central air conditioning system of clean rooms.

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