Zinc oxide has numerous commercial device applications. Polycrystalline ZnO varistors, for example, are widely used in high voltage and power-related applications in industries such as microelectronics. One of the ways to control the properties of ZnO is its annealing in various environments, including oxygen, which leads to increased hardness and fracture toughness of ceramics. Therefore, the study of micromechanical properties of materials for modern electronics is an important and vital issue, both in terms of technology for improving quality of the final product and from the point of view of prospect of its practical use. The structural properties of the ceramic samples of ZnO have been studied. The average grain size has been defined. The micromechanical properties have been studied. The temperature conditions of increasing microhardness of ZnO have been defined after annealing in an oxygen atmosphere.
 Ozgur U., Alivov Ya. I., Liu C., Teke A., Reshchikov M.A., Doğan S., Avrutin V., Cho S.-J., Morkoc H. A comprehensive review of ZnO materials and devices // J. Appl. Phys. – 2005. – Vol. 98. – P. 041301–041310.
 Pan F., Song C., Liu X. J., Yang Y. C., Zeng F. Ferromagnetism and possible application in spintronics of transition-metal-doped ZnO films // Materials Science and Engineering. –2008. – R. 62. – P. 1–35.
 Dutta Sreetama, Chattopadhyay S., Sarkar A., Chakrabarti Mahuya, Sanyal D., Jana D. Role of defects in tailoring structural, electrical and optical properties of ZnO // Progress in Materials Science. – 2009. – № 54. – P. 89–136.
 Cheng H., Xu X. J., Hng H. H., Ma J. Characterization of Al-doped ZnO thermoelectric materials prepared by RF plasma powder processing and hot press sintering // Science Direct. – 2009. – № 35. – P. 3067–3072.
 Orton J. W., Powell M. T. The Hall Effect in Polycrystalline and Powdered Semiconductors // Repts. Prog. Phys. –1980. – Vol. 43, №11. – P. 1263–1307.
 Chaari M., Matoussi A., Fakhfakh Z. Structural and Dielectric Properties of Sintering Zinc Oxide Bulk Ceramic // Materials Sciences and Application, 2011, 2, 765–770.
 Abdullin Kh. A., Bakranov N. B., Ismailov D. V., Kalkozova J. K., Kumekov S. E., Podrezova L. V., Cicero G. Composite materials based on nanostructured zinc oxide // Semiconductor, 2014, V 48, № 4 487–491.
 Pinckney L. R. Transparent glass-ceramics based on ZnO crystals // Phys. Chem. Glasses: Eur. J. Glass Sci. Technol. B, 2006, 47 (2), 127–130.
 Virt I. S., Hadzaman I. V., Bilyk I. S., Rudyi I. O., Kurilo I. V., Frugynskyi M. S., Potera P. Properties of ZnO and ZnMnO thin films obtained by pulsed laser ablation // Acta Physica Polonica. – 2010. – Vol. 117, № 1. – P. 34–37.
 Joint Committee on Powder Diffraction Standards (JCPDS) diffraction data card, published by American Society for Testing and Materials (ASTM).
 Tae-Bong Hur, Dae-Hwang Yoo, Gwang Soo Jeen, Yoon-Hwae Hwang and Hyung-Kook Kim_The Efects of Thermal Annealing of ZnO Ceramics // Journal of the Korean Physical Society. – 2003. – Vol. 42. –
 Electrical characterization of ZnO ceramics by scanning tunneling spectroscopy and beam-induced current in the scanning tunneling microscope / C. Dıaz-Guerra and J. Piquerasa // Journal of applied physics, 1999. – Vol. 86, №4, 1874–1877.