Surface Modification of Gallium Arsenide by Electrochemical Methods in Different Electrolyte Compositions

: pp. 262 - 271
Berdyansk State Pedagogical University
Berdyansk State Pedagogical University
Berdyansk State Pedagogical University
Berdyansk State Pedagogical University
Berdyansk State Pedagogical University
Berdyansk State Pedagogical University
Berdyansk State Pedagogical University

We present the study of the n-GaAs surface modification by the electrochemical etching in different electrolyte compositions. The possibility of forming the different micromorphology types on the identical GaAs samples, in particular the possibility of forming the crystallographic, defective-dislocation, and isotope interfaces, was investigated.

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