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  3. Volume 17, Number 2, 2023
  4. Surface Modification of Gallium Arsenide by Electrochemical Methods in Different Electrolyte Compositions

Surface Modification of Gallium Arsenide by Electrochemical Methods in Different Electrolyte Compositions

JCCT.
2023;
Volume 17, Number 2
: pp. 262 - 271
https://doi.org/10.23939/chcht17.02.262
Authors:
  1. Yana Suchikova
  2. Sergii Kovachov
  3. Andriy Lazarenko
  4. Hanna Lopatina
  5. Natalia Tsybuliak
  6. Olha Нurenko
  7. Ihor Bohdanov
1
Berdyansk State Pedagogical University
2
Berdyansk State Pedagogical University
3
Berdyansk State Pedagogical University
4
Berdyansk State Pedagogical University
5
Berdyansk State Pedagogical University
6
Berdyansk State Pedagogical University
7
Berdyansk State Pedagogical University

We present the study of the n-GaAs surface modification by the electrochemical etching in different electrolyte compositions. The possibility of forming the different micromorphology types on the identical GaAs samples, in particular the possibility of forming the crystallographic, defective-dislocation, and isotope interfaces, was investigated.

micromorphology
electrochemical etching
electrochemical reaction
electrolyte
anodizing voltage
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