In micro- and nanotechnology, the demands placed on measurement technology are increasing. The structures to be measured are becoming more complex with smaller structure widths, increasingly larger surface regions, and thousands of inspection features. To solve the problems, it has become desirable and even necessary to combine multi-sensor technology with high precision nanopositioning and nano measuring technology. The Nanopositioning and Nanomeasuring Machine NMM-1 with a measuring range of 25 mm × 25 mm × 5 mm and sub-nanometer resolution allow the application of several optical, tactile and atomic force probes. The combination of several sensor technologies in a multi-sensor approach for application with the NMM-1 is demonstrated.
 International Technology Roadmap for Semiconductors, 2009. [Online] Available: http://www.itrs.net/Links /2009ITRS /2009Chapters_2009Tables/2009_Metrology.pdf)
 G. Jäger, E. Manske, T. Hausotte, H.-J. Büchner, “The metrological basis and operation of nanopositioning and nanomeasuring machine NMM-1,” Tech. Mess., vol. 76, no. 5, 2009, pp. 227–234.
 E. Manske, T. Hausotte, R. Mastylo, T. Machleidt, K.-H. Franke and G. Jäger, “New applications of the nanopositioning and nanomeasuring machine by using advanced tactile and non-tactile probes,” Meas. Sci. Technol., vol. 18, no. 2, 2007, pp. 520–527.
 T. Machleidt, E. S., D. Kapusi, and K.a-H. Franke, “Depth From Focus (DFF) Utilizing the Large Measuring Volume of a Nanopositioning and Nanomeasuring Machine,” Proc. Sensoren und Messsysteme, Nürnberg, Germany, pp. 478-481, May 2010.
 T. Machleidt, E. Sparrer, N. Dorozhovets, E. Manske, K.-H. Franke, and D. Kapusi, “Navigation in a Large Measurement Volume by Using AFM Technology as a Sensor System in the NPMM,” Tech. Mess., vol. 76, no. 5, 2009, pp. 274-277.
 S. Buetefisch, G. Dai, H.-U. Danzebrink, L. Koenders, F. Solzbacher, and M.P. Orthner, "Novel design for an ultra high precision 3D micro probe for CMM applications," Proc. Eurosensors XXIV, September 5–8, 2010, Linz, Austria, vol. 5, 2010, pp. 705–712.
 M.Ritter, T. Dziomba, A. Kranzmann, and L.Koenders, „A landmark-based 3D calibration strategy for SPM,“ Meas. Sience Techn., Vol. 18, 2007, pp. 404-414.
 E.Manske, G. Jäger, T. Hausotte, and T. Machleidt, “Multisensor technology based on a laser focus probe for nanomeasuring applications over large areas, In Proc. of the SPIE - The Internat. Soc. for Opt. Eng., Vol. 8082, 2011, pp.: 808203 (9 pp.).