Simulation of mechanical components integrated Accelerometers

2014;
: pp. 68 - 71
Authors: 

Karkulovskyy B., Karkulovskyy V., Bolshevskyy R.

B. Karkulovskyy-1 , V. Karkulovskyy-2 , R. Bolshevskyy-2

  1. Lviv Polytechnic National University, ASU Department,
  2. Lviv Polytechnic National University, CAD Department

In the paper the model of integrated accelerometer is presented. Obtained in an analytical form solution of the differential equation describing this model.

1. Teslyuk V., Zaharyuk R., Chura I., Karkulyovskyy V. Modeling Of Capacitive Accelerometer // Proc. of the 1st Inter. Conf. of Young Scientists “Perspective Technologies and Methods in MEMS Design” (MEMSTECH 2005).– Lviv–Polyana, Ukraine, 2005. – P. 52–53. 2. Кособуцький П. С. Моделювання коливань простих систем : монографія / П. С. Кособуцький, М. В. Лобур. - Львів: Нац. ун-т “Львівська політехніка”, 2003. – 224 c.